JPS6124932A - 清浄作業室装置 - Google Patents

清浄作業室装置

Info

Publication number
JPS6124932A
JPS6124932A JP14413784A JP14413784A JPS6124932A JP S6124932 A JPS6124932 A JP S6124932A JP 14413784 A JP14413784 A JP 14413784A JP 14413784 A JP14413784 A JP 14413784A JP S6124932 A JPS6124932 A JP S6124932A
Authority
JP
Japan
Prior art keywords
clean
main passage
air
work room
room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14413784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0575930B2 (en]
Inventor
Katsuto Yagi
八木　克人
Yuji Isayama
諌山　雄二
Hiroto Nagatomo
長友　宏人
Fumio Suzuki
文雄 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14413784A priority Critical patent/JPS6124932A/ja
Publication of JPS6124932A publication Critical patent/JPS6124932A/ja
Publication of JPH0575930B2 publication Critical patent/JPH0575930B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
JP14413784A 1984-07-13 1984-07-13 清浄作業室装置 Granted JPS6124932A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14413784A JPS6124932A (ja) 1984-07-13 1984-07-13 清浄作業室装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14413784A JPS6124932A (ja) 1984-07-13 1984-07-13 清浄作業室装置

Publications (2)

Publication Number Publication Date
JPS6124932A true JPS6124932A (ja) 1986-02-03
JPH0575930B2 JPH0575930B2 (en]) 1993-10-21

Family

ID=15355077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14413784A Granted JPS6124932A (ja) 1984-07-13 1984-07-13 清浄作業室装置

Country Status (1)

Country Link
JP (1) JPS6124932A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7216527B2 (en) 2002-05-28 2007-05-15 Sony Corporation Gas detection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7216527B2 (en) 2002-05-28 2007-05-15 Sony Corporation Gas detection device

Also Published As

Publication number Publication date
JPH0575930B2 (en]) 1993-10-21

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees